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LEADER |
00938cam a2200253 7i4500 |
001 |
0000075554 |
005 |
20230301090000.0 |
020 |
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|a 9781510627611 (electronic book)
|
090 |
0 |
0 |
|a TK7874
|b .L52 2019
|
100 |
1 |
|
|a Levinson, Harry J
|
245 |
1 |
0 |
|a Principles of lithography
|c Harry J. Levinson.
|
250 |
|
|
|a Fourth edition.
|
264 |
|
|
|a Bellingham, Washington, USA:
|b SPIE Press,
|c 2019.
|
300 |
|
|
|a 1 online resource (571 pages):
|b illustrations, text file, PDF.
|
336 |
|
|
|a text
|2 rdacontent
|
337 |
|
|
|a computer
|2 rdamedia
|
338 |
|
|
|a online resource
|2 rdacarrier
|
650 |
|
0 |
|a Microlithography
|
650 |
|
0 |
|a Integrated circuits --
|x Design and construction
|
655 |
|
0 |
|a Electronic books
|
856 |
4 |
2 |
|u http://library.unisel.edu.my/web/guest/mylibrary
|
997 |
|
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|a Engineering & Life Sciences, Faculty
|b Engineering, Department
|
998 |
|
|
|a Electrical Engineering, Degree
|
999 |
|
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|a EBO0018679
|b EBOOK
|c EBOOK
|e Electronic resources
|