LEADER 00890cam a2200241 7i4500
001 0000061290
005 20210827090000.0
020 |a 9789811059452 (electronic book)  
090 0 0 |a TK7875   |b .M53 2018 
245 0 0 |a Micro electro mechanical systems   |c Qing-An Huang, editor. 
264 |a Singapore:   |b Springer,   |c 2018. 
300 |a 1 online resource (1479 pages):   |b colour illustrations, text file, PDF. 
336 |a text  |2 rdacontent 
337 |a computer  |2 rdamedia 
338 |a online resource  |2 rdacarrier 
490 0 |a Micro/nano technologies 
650 0 |a Microelectromechanical systems  
655 0 |a Electronic books 
700 1 |a Huang, Qing-An  
856 4 2 |u http://library.unisel.edu.my/web/guest/mylibrary 
997 |a Engineering & Life Sciences, Faculty  |b Engineering, Department 
998 |a Mechanical Engineering, Degree 
999 |a EBO0006609  |b EBOOK  |c EBOOK  |e Electronic resources