Micro electro mechanical systems
| Other Authors: | Huang, Qing-An |
|---|---|
| Series: |
Micro/nano technologies
|
| Subjects: | |
| Online Access: |
http://library.unisel.edu.my/web/guest/mylibrary |
| Physical Description: |
1 online resource (1479 pages): colour illustrations, text file, PDF. |
|---|---|
| ISBN: |
9789811059452 (electronic book) |


