Photonic MEMS devices : design, fabrication and control
by: Ai-Qun, Liu
Published: (2009)
Advanced mechatronics and MEMS devices II
| Other Authors: | Zhang, Dan, Wei, Bin |
|---|---|
| Published: |
Switzerland:
Springer,
2017.
|
| Series: |
Microsystems and nanosystems
|
| Subjects: | |
| Online Access: |
http://library.unisel.edu.my/equip-unisel/custom/ebook_catalog/ebook/AdvancedMechatronicsandMEMSDevicesIIcompressed.pdf |