Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range
| Other Authors: | Koenders, Ludger, Wilkening, Gunter |
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| Published: |
Weinheim:
Wiley-VCH,
2005.
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| Subjects: |
| Physical Description: |
xxii, 519 p.: ill.; 25 cm. |
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| Bibliography: |
Includes bibliographical references and index |
| ISBN: |
352740502X 9783527405022 |