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| LEADER |
00684cam a2200205 7i4500 |
| 001 |
0000051011 |
| 005 |
20170405090000.0 |
| 020 |
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|a 9783527310807
|
| 020 |
|
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|a 3527310800
|
| 090 |
0 |
0 |
|a TK7875
|b .C56 2005
|
| 245 |
0 |
0 |
|a CMOS-MEMS
|c volume editors O. Brand and G. K. Fedder.
|
| 260 |
|
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|a Weinheim:
|b Wiley-VCH,
|c 2005.
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| 300 |
|
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|a xiv, 594 p.:
|b ill.;
|c 25 cm.
|
| 490 |
1 |
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|a Advanced micro & nanosystems;
|v v. 2
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| 504 |
|
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|a Includes bibliographical references and index
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| 650 |
0 |
0 |
|a Metal oxide semiconductors --
|x Complementary
|
| 650 |
0 |
0 |
|a Microelectromechanical systems
|
| 700 |
1 |
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|a Brand, O
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| 700 |
1 |
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|a Fedder, G. K
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| 999 |
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|a 0000060647
|b BOK
|c OPEN SHELF
|e 1st Floor, Shah Alam
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