CMOS-MEMS
| Other Authors: | Brand, O, Fedder, G. K |
|---|---|
| Published: |
Weinheim:
Wiley-VCH,
2005.
|
| Series: |
Advanced micro & nanosystems;
v. 2 |
| Subjects: |
| Physical Description: |
xiv, 594 p.: ill.; 25 cm. |
|---|---|
| Bibliography: |
Includes bibliographical references and index |
| ISBN: |
9783527310807 3527310800 |