Photonic MEMS devices : design, fabrication and control
by: Ai-Qun, Liu
Published: (2009)
Cost-driven design of smart microsystems
| Main Author: | Niedermayer, Michael |
|---|---|
| Published: |
Boston:
Artech House,
c2012.
|
| Series: |
Artech House integrated microsystems series
|
| Subjects: |
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