Photonic MEMS devices : design, fabrication and control
by: Ai-Qun, Liu
Published: (2009)
Introductory MEMS : fabrication and applications
| Main Author: | Adams, Thomas M |
|---|---|
| Other Authors: | Layton, Richard A |
| Language: | English |
| Published: |
New York:
Springer,
2010.
|
| Subjects: |