rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Introductory MEMS
    sub title: fabrication and applications
  name:
    name part: Adams, Thomas M
    role:
      role term: creator
  name:
    name part: Layton, Richard A
  type of resource: text
  origin info:
    place:
      place term: New York
    publisher: Springer
    date issued: 2010
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xv, 444p.: ill.; 24 cm.
  note: Thomas M. Adams, Richard A. Layton.
  subject:
    topic: Microelectromechanical systems
  subject:
    topic: Very high speed integrated circuits
  identifier: 9780387095103 (hbk.)
  record info:
    record creation date: 110329
    record change date: 20191017090000.0
    record identifier: 0000038268