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| LEADER |
00763cam a2200205 7i4500 |
| 001 |
0000038268 |
| 005 |
20191017090000.0 |
| 008 |
110329 eng |
| 020 |
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|a 9780387095103 (hbk.)
|
| 090 |
0 |
0 |
|a TK7875
|b .A22 2010
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| 100 |
1 |
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|a Adams, Thomas M
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| 245 |
1 |
0 |
|a Introductory MEMS :
|b fabrication and applications
|c Thomas M. Adams, Richard A. Layton.
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| 260 |
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|a New York:
|b Springer,
|c 2010.
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| 300 |
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|a xv, 444p.:
|b ill.;
|c 24 cm.
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| 650 |
0 |
0 |
|a Microelectromechanical systems
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| 650 |
0 |
0 |
|a Very high speed integrated circuits
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| 700 |
1 |
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|a Layton, Richard A
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| 997 |
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|a Engineering & Life Sciences, Faculty
|b Engineering, Department
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| 998 |
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|a Mechanical Engineering, Degree
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| 999 |
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|a 0000048768
|b BOK
|c OPEN SHELF
|e 2nd Floor, Bestari Jaya
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