Introductory MEMS : fabrication and applications
| Main Author: | Adams, Thomas M |
|---|---|
| Other Authors: | Layton, Richard A |
| Language: | English |
| Published: |
New York:
Springer,
2010.
|
| Subjects: |
| Physical Description: |
xv, 444p.: ill.; 24 cm. |
|---|---|
| ISBN: |
9780387095103 (hbk.) |