Defects in microelectronic materials and devices
| Other Authors: | Fleetwood, Daniel M., Pantelides, Sokrates T., Schrimpf, Ronald D. |
|---|---|
| Language: | English |
| Published: |
Boca Raton:
CRC Press,
2009.
|
| Subjects: |
| Physical Description: |
xvi, 753 p.: ill.; 26 cm. |
|---|---|
| Bibliography: |
Includes bibliographical references and index |
| ISBN: |
9781420043761 (hbk.) |