Photomask fabrication technology

Main Author: Eynon, Benjamin G
Other Authors: Banqiu, Wu
Language: English
Published: New York: McGraw-Hill, 2005.
Series: McGraw-Hill electronic engineering
Subjects:
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005 20170218090000.0
008 091125 eng
020 |a 0071445633 (hbk.)  
020 |a 9780071445634 (hbk.)  
040 |a DLC 
090 0 0 |a TK7872.M3   |b E96 2005 
100 1 |a Eynon, Benjamin G  
245 1 0 |a Photomask fabrication technology   |c Benjamin G. Eynon, Jr., Banqiu Wu. 
260 |a New York:   |b McGraw-Hill,   |c 2005. 
300 |a xi, 571 p.:   |b ill.;   |c 24 cm. 
490 0 |a McGraw-Hill electronic engineering 
504 |a Includes bibliographical references and index 
650 0 0 |a Integrated circuits --   |x Masks  
650 0 0 |a Microlithography  
650 0 0 |a Masks (Electronics)  
700 3 |a Banqiu, Wu  
997 |a Engineering, Faculty  |b Engineering, Department 
998 |a Electrical & Electronic Engineering, Diploma 
998 |a Electrical Engineering, Degree 
998 |a Electronics Engineering, Degree 
999 |a 0000037858  |b BOK  |c OPEN SHELF  |e 1st Floor, Bestari Jaya