Introductory MEMS : fabrication and applications
by: Adams, Thomas M
Published: (2010)
Photonic MEMS devices : design, fabrication and control
| Main Author: | Ai-Qun, Liu |
|---|---|
| Other Authors: | Xuming, Zhang |
| Language: | English |
| Published: |
Boca Raton:
CRC Press,
2009.
|
| Series: |
Optical science and engineering series;
136 |
| Subjects: |