rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Photonic MEMS devices
    sub title: design, fabrication and control
  name:
    name part: Ai-Qun, Liu
    role:
      role term: creator
  name:
    name part: Xuming, Zhang
  type of resource: text
  origin info:
    place:
      place term: Boca Raton
    publisher: CRC Press
    date issued: 2009
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: 483 p.: ill.; 27 cm.
  note: Ai-Qun Liu ; co-authors, Xuming Zhang ... [et al.].
  note: Includes bibliographical references
  subject:
    topic: Photonics
  subject:
    topic: Microelectromechanical systems
  identifier: 9781420045680 (hbk.)
  identifier: 1420045687
  record info:
    record content source: USM
    record creation date: 091111
    record change date: 20170218090000.0
    record identifier: 0000030807