Photonic MEMS devices : design, fabrication and control

Main Author: Ai-Qun, Liu
Other Authors: Xuming, Zhang
Language: English
Published: Boca Raton: CRC Press, 2009.
Series: Optical science and engineering series; 136
Subjects:
LEADER 00851cam a2200241 7i4500
001 0000030807
005 20170218090000.0
008 091111 eng
020 |a 9781420045680 (hbk.)  
020 |a 1420045687  
040 |a USM 
090 0 0 |a TK7875   |b .A37 2009 
100 1 |a Ai-Qun, Liu  
245 1 0 |a Photonic MEMS devices :   |b design, fabrication and control   |c Ai-Qun Liu ; co-authors, Xuming Zhang ... [et al.]. 
260 |a Boca Raton:   |b CRC Press,   |c 2009. 
300 |a 483 p.:   |b ill.;   |c 27 cm. 
490 1 |a Optical science and engineering series;   |v 136 
504 |a Includes bibliographical references 
650 0 0 |a Photonics  
650 0 0 |a Microelectromechanical systems  
700 1 |a Xuming, Zhang  
997 |a Engineering, Faculty  |b Engineering, Department 
999 |a 0000035155  |b BOK  |c OPEN SHELF  |e 1st Floor, Bestari Jaya