Photonic MEMS devices : design, fabrication and control

Main Author: Ai-Qun, Liu
Other Authors: Xuming, Zhang
Language: English
Published: Boca Raton: CRC Press, 2009.
Series: Optical science and engineering series; 136
Subjects:
Physical Description: 483 p.: ill.; 27 cm.
Bibliography: Includes bibliographical references
ISBN: 9781420045680 (hbk.)
1420045687