Thermal conduction analysis of polycrystalline silicon by excimer laser annealing considering substrate temperature
by: Tee, Yet Ling
Published: (2005)
The properties of Excimer Laser Annealing (ELA) and the effect of hydrogen in the crystallization of amorphous silicon
Main Author: | Azlia Jaapar |
---|---|
Language: | English |
Published: |
Bestari Jaya, Selangor:
UNISEL,
2005.
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Subjects: |
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