Thermal conduction analysis of polycristalline silicon crystallization by excimer laser annealing considering the amorphous silicon thickness
by: Loo, Jung Ming
Published: (2005)
Thermal conduction analysis of polycrystalline silicon by excimer laser annealing considering substrate temperature
| Main Author: | Tee, Yet Ling |
|---|---|
| Language: | English |
| Published: |
Bestari Jaya, Selangor:
UNISEL,
2005.
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| Subjects: |