rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: MEMS/MOEMS packaging
    sub title: concepts, designs, materials, and processes
  name:
    name part: Gilleo, Ken
    role:
      role term: creator
  type of resource: text
  origin info:
    place:
      place term: New York
    publisher: McGraw-Hill
    date issued: 2005
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xiii, 220 p.: ill.; 24 cm.
  note: Ken Gilleo.
  note: Includes bibliographical references and index
  subject:
    topic: Optoelectronic devices
  subject:
    topic: Microelectronic packaging
  subject:
    topic: Microelectromechanical systems
  related item:
    title info:
      title: McGraw-Hill nanoscience and technology series
  identifier: 0071455566 (hbk.)
  identifier: 9780071455565
  record info:
    record content source: DLC
    record creation date: 070820
    record change date: 20191025090000.0
    record identifier: 0000017306