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00930cam a2200253 7i4500 |
001 |
0000017306 |
005 |
20191025090000.0 |
008 |
070820 eng |
020 |
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|a 0071455566 (hbk.)
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020 |
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|a 9780071455565
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040 |
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|a DLC
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090 |
0 |
0 |
|a TK7870.15
|b .G55 2005
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100 |
1 |
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|a Gilleo, Ken
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245 |
1 |
0 |
|a MEMS/MOEMS packaging :
|b concepts, designs, materials, and processes
|c Ken Gilleo.
|
260 |
|
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|a New York:
|b McGraw-Hill,
|c 2005.
|
300 |
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|a xiii, 220 p.:
|b ill.;
|c 24 cm.
|
490 |
0 |
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|a McGraw-Hill nanoscience and technology series
|
504 |
|
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|a Includes bibliographical references and index
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650 |
0 |
0 |
|a Optoelectronic devices
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650 |
0 |
0 |
|a Microelectronic packaging
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650 |
0 |
0 |
|a Microelectromechanical systems
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997 |
|
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|a Business & Accountancy, Faculty
|
997 |
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|a Engineering & Life Sciences, Faculty
|b Engineering, Department
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999 |
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|a 0000027981
|b BOK
|c OPEN SHELF
|e 2nd Floor, Bestari Jaya
|