MEMS/MOEMS packaging : concepts, designs, materials, and processes

Main Author: Gilleo, Ken
Language: English
Published: New York: McGraw-Hill, 2005.
Series: McGraw-Hill nanoscience and technology series
Subjects:
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008 070820 eng
020 |a 0071455566 (hbk.)  
020 |a 9780071455565  
040 |a DLC 
090 0 0 |a TK7870.15   |b .G55 2005 
100 1 |a Gilleo, Ken  
245 1 0 |a MEMS/MOEMS packaging :   |b concepts, designs, materials, and processes   |c Ken Gilleo. 
260 |a New York:   |b McGraw-Hill,   |c 2005. 
300 |a xiii, 220 p.:   |b ill.;   |c 24 cm. 
490 0 |a McGraw-Hill nanoscience and technology series 
504 |a Includes bibliographical references and index 
650 0 0 |a Optoelectronic devices  
650 0 0 |a Microelectronic packaging  
650 0 0 |a Microelectromechanical systems  
997 |a Business & Accountancy, Faculty 
997 |a Engineering & Life Sciences, Faculty  |b Engineering, Department 
999 |a 0000027981  |b BOK  |c OPEN SHELF  |e 2nd Floor, Bestari Jaya