MEMS/MOEMS packaging : concepts, designs, materials, and processes
| Main Author: | Gilleo, Ken |
|---|---|
| Language: | English |
| Published: |
New York:
McGraw-Hill,
2005.
|
| Series: |
McGraw-Hill nanoscience and technology series
|
| Subjects: |
| Physical Description: |
xiii, 220 p.: ill.; 24 cm. |
|---|---|
| Bibliography: |
Includes bibliographical references and index |
| ISBN: |
0071455566 (hbk.) 9780071455565 |