Plasma-aided nanofabrication : from plasma sources to nanoassembly

Main Author: Ostrikov, Kostya (Ken)
Language: English
Published: KGaA, Weinheim: Wiley-VCH Verlag GmbH & Co., 2007.
Subjects:
LEADER 00905cam a2200241 7i4500
001 0000009850
005 20170218090000.0
008 080613 eng
020 |a 9783527406333  
040 |a IIUM 
090 0 0 |a TA418.9.N35   |b O88 2007 
100 1 |a Ostrikov, Kostya (Ken)  
245 1 0 |a Plasma-aided nanofabrication :   |b from plasma sources to nanoassembly   |c Kostya (Ken) Ostrikov and Shuyan Xu. 
260 |a KGaA, Weinheim:   |b Wiley-VCH Verlag GmbH & Co.,   |c 2007. 
300 |a xiii, 300 p.:   |b col. ill.;   |c 25 cm. 
504 |a Includes bibliographical references and index 
650 0 0 |a Plasma engineering  
650 0 0 |a Nanostructured materials  
650 0 0 |a Low temperature plasmas  
650 0 0 |a Manufacturing processes  
997 |a Engineering, Faculty  |b Engineering, Department 
998 |a Civil Engineering, Degree 
999 |a 0000031129  |b BOK  |c OPEN SHELF  |e 2nd Floor, Bestari Jaya