Plasma-aided nanofabrication : from plasma sources to nanoassembly
| Main Author: | Ostrikov, Kostya (Ken) |
|---|---|
| Language: | English |
| Published: |
KGaA, Weinheim:
Wiley-VCH Verlag GmbH & Co.,
2007.
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| Subjects: |
| Physical Description: |
xiii, 300 p.: col. ill.; 25 cm. |
|---|---|
| Bibliography: |
Includes bibliographical references and index |
| ISBN: |
9783527406333 |