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| LEADER |
01000cam a2200265 7i4500 |
| 001 |
0000005984 |
| 005 |
20191017090000.0 |
| 020 |
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|a 9783540639732
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| 020 |
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|a 354063973X (hbk.)
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| 090 |
0 |
0 |
|a TK7836
|b .M48 1998
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| 100 |
1 |
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|a Metev, Simeon Metodiev
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| 245 |
1 |
0 |
|a Laser-assisted microtechnology
|c Simeon M. Metev, Vadim P. Veiko.
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| 250 |
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|a 2nd ed.
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| 260 |
|
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|a Berlin, New York:
|b Springer,
|c 1998.
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| 300 |
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|a xii, 270 p.:
|b ill.;
|c 25 cm.
|
| 490 |
1 |
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|a Springer series in materials science,
|x 0933-033X;
|v 19
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| 504 |
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|a Includes bibliographical references and index
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| 650 |
0 |
0 |
|a Electronic industries --
|x Technological innovations
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| 650 |
0 |
0 |
|a Micromachining
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| 650 |
0 |
0 |
|a Thin film devices --
|x Design and construction
|
| 650 |
0 |
0 |
|a Lasers --
|x Industrial applications
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| 650 |
0 |
0 |
|a Manufacturing processes
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| 700 |
1 |
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|a Veiko, Vadim P
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| 997 |
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|a Engineering & Life Sciences, Faculty
|b Engineering, Department
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| 999 |
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|a 0000009103
|b BOK
|c OPEN SHELF
|e 2nd Floor, Bestari Jaya
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