Description: Laser-assisted microtechnology

Main Author:	Metev, Simeon Metodiev
Other Authors:	Veiko, Vadim P
Published:	Berlin, New York: Springer, 1998.
Edition:	2nd ed.
Series:	Springer series in materials science, 19
Subjects:	Electronic industries -- > Technological innovations Micromachining Thin film devices -- > Design and construction Lasers -- > Industrial applications Manufacturing processes

Physical Description:	xii, 270 p.: ill.; 25 cm.
Bibliography:	Includes bibliographical references and index
ISBN:	9783540639732 354063973X (hbk.)
ISSN:	0933-033X;