Semiconductors for micro- and nanotechnology : an introduction for engineers
| Main Author: | Korvink, Jan. G |
|---|---|
| Other Authors: | Greiner, Andreas |
| Published: |
Weinheim:
Wiley-VCH,
2002.
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| Subjects: |
| Physical Description: |
340 p.: ill.; 24 cm. |
|---|---|
| ISBN: |
3527302573 (pbk.) 9783527302574 |