Physical vapor deposition of thin films

Main Author: Mahan, John E
Published: New York: John Wiley & Sons, Inc., 2000.
Subjects:
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005 20170218090000.0
020 |a 9780471330011  
020 |a 0471330019 (hbk.)  
090 0 0 |a TS695   |b .M34 2000 
100 1 |a Mahan, John E  
245 1 0 |a Physical vapor deposition of thin films   |c John E. Mahan. 
260 |a New York:   |b John Wiley & Sons, Inc.,   |c 2000. 
300 |a xiii, 312 p.:   |b col. ill.;   |c 24 cm. 
504 |a Includes bibliographical references and index 
650 0 0 |a Thin films  
650 0 0 |a Physical vapor deposition  
997 |a Engineering, Faculty  |b Engineering, Department 
999 |a 0000002589  |b BOK  |c OPEN SHELF  |e 1st Floor, Bestari Jaya