Physical vapor deposition of thin films
| Main Author: | Mahan, John E |
|---|---|
| Published: |
New York:
John Wiley & Sons, Inc.,
2000.
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| Subjects: |
| Physical Description: |
xiii, 312 p.: col. ill.; 24 cm. |
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| Bibliography: |
Includes bibliographical references and index |
| ISBN: |
9780471330011 0471330019 (hbk.) |