Microchip fabrication : a practical guide to semiconductor processing

Main Author: Van Zan, Peter
Published: New York: McGraw-Hill, 2004.
Edition: 5th ed.
Subjects:
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020 |a 0071432418 (hbk.)  
020 |a 9780071432412  
090 0 0 |a TK7871.85   |b .V93 2004 
100 1 |a Van Zan, Peter  
245 1 0 |a Microchip fabrication :   |b a practical guide to semiconductor processing   |c Peter Van Zant. 
250 |a 5th ed. 
260 |a New York:   |b McGraw-Hill,   |c 2004. 
300 |a xiii, 642 p.:   |b ill.;   |c 24 cm. 
504 |a Includes bibliographical references and index 
650 0 0 |a Integrated circuits --   |x Design and construction  
650 0 0 |a Semiconductors --   |x Design and construction  
997 |a Engineering & Life Sciences, Faculty  |b Engineering, Department 
999 |a 0000008263  |b BOK  |c OPEN SHELF  |e 2nd Floor, Bestari Jaya