Microchip fabrication : a practical guide to semiconductor processing
| Main Author: | Van Zan, Peter |
|---|---|
| Published: |
New York:
McGraw-Hill,
2004.
|
| Edition: | 5th ed. |
| Subjects: |
| Physical Description: |
xiii, 642 p.: ill.; 24 cm. |
|---|---|
| Bibliography: |
Includes bibliographical references and index |
| ISBN: |
0071432418 (hbk.) 9780071432412 |